MDC presents the RW10 Reference Wafer. A range of capacitors, resistors and semiconductor devices can be measured to verify the repeatability and accuracy of measurement systems.
The MDC Model RW10 Reference Wafer is not actually a "wafer". It has the shape of a wafer and it includes capacitors, resistors, MOS devices, and a junction device in a wafer configuration to allow rapid verification of proper operation for capacitance-voltage and current-voltage instrumentation.
This convenient reference wafer can be placed on a hot chuck system or prober and measured like a regular wafer. It can therefore check the integrity of the entire measurement system including all cables, multiplexers, and probe system components. The RW10 can quickly help isolate problems caused by bad probes, defective cables, improper grounding, or faulty meters.
The RW10 Reference Wafer includes a calibration certificate indicating the measured values for all the Reference Wafer components as well as capacitance-voltage plots for the semiconductor devices.