Probe stations to suit all measurement requirements whether production, engineering or research. See individual data sheets for more details.
- Basic Hot Chuck System: Complete set of components required for mobile ion measurements by conventional bias-temperature stress technique (CVBT) or triangular voltage sweep method (TVS) using the MDC QuietCHUCK DC Hot Chuck Controller. The CSM/WIN System can control and monitor all stress parameters. Multiplexing of up to 10 probes available.
- The DuoCHUCK Integrated Hot Chuck System: Designed for high throughput CVBT mobile ion tests. Contains two hot chucks and all associated control, multiplexing, and stress bias circuitry to make measurements on one to five C-V dots on each chuck. The DuoCHUCK has 10 times the capacity of a conventional single dot probe station.
Wafer Area Prober
- The Model 323, Wafer Area Prober System is designed to work with wafers up to 300 mm (12"). The system is available with integrated video microscope and specially designed dark box to make for easy access and small footprint.